Parts For Sale TEGAL 52-089-001 TEGAL 52-089-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-089-001 Manufacturer TEGAL Part Number 52-089-001 Description Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 7.0 US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 51-251-001 51-092-001 74-124-005 46-787-003 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 51-259-001 40-304-001 ELECTRODE, INSULATOR LOWER 80-202-357 O-Ring 39-735-004 Tegal 903e lower electrode 52-175-001