Parts For Sale TEGAL 52-089-001 TEGAL 52-089-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-089-001 Manufacturer TEGAL Part Number 52-089-001 Description Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 7.0 US Other TEGAL Parts 39-853-005 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 37-476-003 39-818-005C 37-586-003 49-060-001 57-008-001 93-123-006 BELT 40-576-003-C Ring Ceramic Focus Castellated 39-735-004 Tegal 903e lower electrode 41-177-002
