Parts For Sale TEGAL 52-085-001 TEGAL 52-085-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-085-001 Manufacturer TEGAL Part Number 52-085-001 Description Status Available Approx. Qty 11 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 11.0 US Other TEGAL Parts 40-768-006 Insulator Ring 37-411-001 54-011-001 37-605-001 58-043-004 CR1144-00103 CR1144-00103 40-295-003 FOCUS RING 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 37-479-001B
