Parts For Sale TEGAL 52-085-001 TEGAL 52-085-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-085-001 Manufacturer TEGAL Part Number 52-085-001 Description Status Available Approx. Qty 11 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 11.0 US Other TEGAL Parts 58-073-001 74-101-001 40-467-001 39-894-001 99-287-003 SHUTTLE INTERFACE BOARD 39-956-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 52-171-001 40-260-001 WINDOW, SAPPHIRE 1x2.5 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE
