Parts For Sale TEGAL 52-063-001 TEGAL 52-063-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-063-001 Manufacturer TEGAL Part Number 52-063-001 Description Status Available Approx. Qty 52 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 52.0 US Other TEGAL Parts 58-073-001 37-181-001 33-349-004 ELECTRODE, CONDEHEAD UPPER 74-101-001 39-894-001 39-956-001 40-304-001 ELECTRODE, INSULATOR LOWER 50-056-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 37-222-002 Cooling Plate 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 55-008-001 BELT SPAT
