Parts For Sale TEGAL 52-055-001 TEGAL 52-055-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-055-001 Manufacturer TEGAL Part Number 52-055-001 Description Status Available Approx. Qty 65 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 65.0 US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 46-1006-001 37-411-001 54-011-001 37-605-001 58-043-004 CR1144-00103 CR1144-00103 99-249-002 PCB TEGAL END POINT DETECTOR 40-790-001 FOCUS RING 37-479-001B