Parts For Sale TEGAL 52-051-001 TEGAL 52-051-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-051-001 Manufacturer TEGAL Part Number 52-051-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 33-349-004 ELECTRODE, CONDEHEAD UPPER 37-525-002 54-011-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 37-605-001 39-741-026 Tegal 903e lower electrode 58-043-004 CR1144-00103 CR1144-00103 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 37-479-001B 50-056-001