Parts For Sale TEGAL 52-051-001 TEGAL 52-051-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-051-001 Manufacturer TEGAL Part Number 52-051-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 52-058-002 40-768-006 Insulator Ring 83-259-001 80-195-450 51-056-001 42-826-005 39-380-001 39-741-026 Tegal 903e lower electrode 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 51-178-001 37-175-001A
