Parts For Sale TEGAL 52-051-001 TEGAL 52-051-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-051-001 Manufacturer TEGAL Part Number 52-051-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 58-073-001 39-741-004 ELECTRODE, LOWER 6" 37-383-004 99-247-003 SPATULA INTERFACE 46-810-001 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 40-467-001 39-741-026 Tegal 903e lower electrode 39-894-001 52-171-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 39-735-004 Tegal 903e lower electrode
