Parts For Sale TEGAL 52-050-002 TEGAL 52-050-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-050-002 Manufacturer TEGAL Part Number 52-050-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 52-058-002 74-038-001 56-006-001 CR1144-00104 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 1106915402 MOTOR AND PUMPP/N:1106915402 CR1144-00103 CR1144-00103 39-733-004 Tegal 903e lower electrode 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 52-175-001