Parts For Sale TEGAL 52-047-001 TEGAL 52-047-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-047-001 Manufacturer TEGAL Part Number 52-047-001 Description Status Available Approx. Qty 20 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 20.0 US Other TEGAL Parts 58-073-001 37-181-001 74-101-001 39-894-001 39-956-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 50-056-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 39-735-004 Tegal 903e lower electrode 150 mm 150 mm 25 slot Aluminum wafer carrier.
