Parts For Sale TEGAL 52-047-001 TEGAL 52-047-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-047-001 Manufacturer TEGAL Part Number 52-047-001 Description Status Available Approx. Qty 20 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 20.0 US Other TEGAL Parts 58-073-001 37-221-002 UPPER ELECT ANOD, NON ANODIZED 40-481-002 Insulator Ring 74-101-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-467-001 39-894-001 39-956-001 93-123-006 BELT 52-047-002 39-735-004 Tegal 903e lower electrode 80-200-121 BEARING DOOR T915 TEGAL CORPORATION
