Parts For Sale TEGAL 52-031-001 TEGAL 52-031-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-031-001 Manufacturer TEGAL Part Number 52-031-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 39-853-005 74-038-001 52-050-001 74-003-002 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 52-167-001 40-576-003-C Ring Ceramic Focus Castellated 80-202-357 O-Ring 58-046-001 83-288-001