Parts For Sale TEGAL 52-031-001 TEGAL 52-031-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-031-001 Manufacturer TEGAL Part Number 52-031-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-481-002 Insulator Ring 74-038-001 56-006-001 CR1144-00104 52-050-001 39-761-001 CR1144-00103 CR1144-00103 40-790-001 FOCUS RING 52-175-001
