Parts For Sale TEGAL 52-004-001 TEGAL 52-004-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-004-001 Manufacturer TEGAL Part Number 52-004-001 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 37-383-004 31-406-003 WAFER SENSOR ASSY-VCE 46-810-001 40-467-001 39-894-001 52-171-001 52-047-002 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02
