Parts For Sale TEGAL 52-004-001 TEGAL 52-004-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-004-001 Manufacturer TEGAL Part Number 52-004-001 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 58-073-001 37-181-001 33-349-004 ELECTRODE, CONDEHEAD UPPER 40-481-002 Insulator Ring 74-101-001 39-894-001 39-956-001 80-202-357 O-Ring 50-056-001
