Parts For Sale TEGAL 51-267-001 TEGAL 51-267-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-267-001 Manufacturer TEGAL Part Number 51-267-001 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 40-768-004 Insulator Ring 39-741-004 ELECTRODE, LOWER 6" 39-853-005 40-768-006 Insulator Ring 83-259-001 74-098-001 52-050-001 52-041-001 52-167-001 40-576-003-C Ring Ceramic Focus Castellated 51-271-001 58-046-001