Parts For Sale TEGAL 51-264-001 TEGAL 51-264-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-264-001 Manufacturer TEGAL Part Number 51-264-001 Description Status Available Approx. Qty 37 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 37.0 US Other TEGAL Parts 58-073-001 37-181-001 39-741-004 ELECTRODE, LOWER 6" 99-247-003 SPATULA INTERFACE 80-650-053 ACTUATOR 74-101-001 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 39-956-001 50-056-001 37-222-002 Cooling Plate
