Parts For Sale TEGAL 51-264-001 TEGAL 51-264-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-264-001 Manufacturer TEGAL Part Number 51-264-001 Description Status Available Approx. Qty 37 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 37.0 US Other TEGAL Parts 58-073-001 74-101-001 40-467-001 39-894-001 99-287-003 SHUTTLE INTERFACE BOARD 39-956-001 40-295-003 FOCUS RING 52-047-002 39-735-004 Tegal 903e lower electrode
