Parts For Sale TEGAL 51-218-002 TEGAL 51-218-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-218-002 Manufacturer TEGAL Part Number 51-218-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-073-001 CR1008-00104 80-650-053 ACTUATOR 74-101-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 99-287-003 SHUTTLE INTERFACE BOARD CR1144-00103 CR1144-00103 80-202-357 O-Ring CR1303-10202 56-055-001