Parts For Sale TEGAL 51-189-004 TEGAL 51-189-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-189-004 Manufacturer TEGAL Part Number 51-189-004 Description Status Available Approx. Qty 31 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 31.0 US Other TEGAL Parts 58-073-001 46-810-001 40-467-001 39-741-026 Tegal 903e lower electrode 39-894-001 39-761-001 52-171-001 52-047-002 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.
