Parts For Sale TEGAL 51-186-001 TEGAL 51-186-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-186-001 Manufacturer TEGAL Part Number 51-186-001 Description Status Available Approx. Qty 16 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 16.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 58-073-001 37-181-001 39-741-004 ELECTRODE, LOWER 6" 74-101-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 39-956-001 40-304-001 ELECTRODE, INSULATOR LOWER 50-056-001