Parts For Sale TEGAL 51-178-001 TEGAL 51-178-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-178-001 Manufacturer TEGAL Part Number 51-178-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 39-741-004 ELECTRODE, LOWER 6" 51-259-003 51-191-001 52-050-001 52-167-001 40-304-001 ELECTRODE, INSULATOR LOWER 58-046-001 80-200-121 BEARING DOOR T915 TEGAL CORPORATION 83-288-001