Parts For Sale TEGAL 51-147-001 TEGAL 51-147-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-147-001 Manufacturer TEGAL Part Number 51-147-001 Description SPACER, SHOULDER Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 4.0 US Other TEGAL Parts 47-155-001 46-787-002 39-563-001 39-741-026 Tegal 903e lower electrode 47-080-003 41-271-002 40-790-001 FOCUS RING 15394-2 Spacer 50-056-001 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 37-222-002 Cooling Plate
