Parts For Sale TEGAL 51-147-001 TEGAL 51-147-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-147-001 Manufacturer TEGAL Part Number 51-147-001 Description SPACER, SHOULDER Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 4.0 US Other TEGAL Parts 46-879-001 39-853-005 99-247-003 SPATULA INTERFACE 47-583-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 47-695-001 41-362-002 32-415-002 50-056-001 37-222-002 Cooling Plate
