Parts For Sale TEGAL 51-147-001 TEGAL 51-147-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-147-001 Manufacturer TEGAL Part Number 51-147-001 Description SPACER, SHOULDER Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 4.0 US Other TEGAL Parts 40-768-004 Insulator Ring 46-437-002 41-135-001 47-526-001 46-735-002 51-191-001 47-672-001 40-140-001 RING, CERAMIC INSULATOR 40-576-003-C Ring Ceramic Focus Castellated 80-200-121 BEARING DOOR T915 TEGAL CORPORATION