Parts For Sale TEGAL 51-147-001 TEGAL 51-147-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-147-001 Manufacturer TEGAL Part Number 51-147-001 Description SPACER, SHOULDER Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 4.0 US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 51-251-001 51-092-001 74-124-005 42-326-002 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 99-287-003 SHUTTLE INTERFACE BOARD 42-960-003 39-735-004 Tegal 903e lower electrode 46-556-002 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL
