Parts For Sale TEGAL 51-147-001 TEGAL 51-147-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-147-001 Manufacturer TEGAL Part Number 51-147-001 Description SPACER, SHOULDER Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 4.0 US Other TEGAL Parts 80-195-450 80-1025-01 HEATER 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 42-456-003 40-790-001 FOCUS RING 42-180-001/002 39-533-001 37-668-001
