Parts For Sale TEGAL 51-145-002 TEGAL 51-145-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-145-002 Manufacturer TEGAL Part Number 51-145-002 Description Status Available Approx. Qty 20 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 20.0 US Other TEGAL Parts 58-073-001 37-181-001 39-680-003 ELECTRODE, CONEHEAD VENTED 40-395-001 RING, FLAT 6 74-101-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 39-894-001 39-956-001 50-056-001 37-222-002 Cooling Plate