Parts For Sale TEGAL 51-082-001 TEGAL 51-082-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-082-001 Manufacturer TEGAL Part Number 51-082-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 51-259-003 38-023-001 COOLING RING 51-191-001 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 52-050-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 39-761-001 39-733-004 Tegal 903e lower electrode 52-167-001 58-046-001 83-288-001 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL
