Parts For Sale TEGAL 51-074-001 TEGAL 51-074-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-074-001 Manufacturer TEGAL Part Number 51-074-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-073-001 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 74-101-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 51-286-001 40-790-001 FOCUS RING 51-161-001 56-055-001 51-093-003 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%