Parts For Sale TEGAL 51-074-001 TEGAL 51-074-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-074-001 Manufacturer TEGAL Part Number 51-074-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 51-251-001 51-092-001 51-270-002 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT CR1144-00103 CR1144-00103 51-263-001 52-175-001 150 mm 150 mm 25 slot Aluminum wafer carrier.
