Parts For Sale TEGAL 51-052-001 TEGAL 51-052-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-052-001 Manufacturer TEGAL Part Number 51-052-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 33-349-004 ELECTRODE, CONDEHEAD UPPER 58-053-001 38-023-001 COOLING RING 83-259-001 80-195-450 51-056-001 CR1008-00408EX CR1008-00408EX 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 00-0917-2 5" GUIDE RING #G00-0917-2 51-178-001
