Parts For Sale TEGAL 51-052-001 TEGAL 51-052-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-052-001 Manufacturer TEGAL Part Number 51-052-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 39-680-003 ELECTRODE, CONEHEAD VENTED 51-259-003 46-1006-001 51-191-001 40-395-001 RING, FLAT 6 52-050-001 39-733-004 Tegal 903e lower electrode 52-167-001 40-576-003-C Ring Ceramic Focus Castellated 58-046-001 83-288-001