Parts For Sale TEGAL 50-020-001 TEGAL 50-020-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 50-020-001 Manufacturer TEGAL Part Number 50-020-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 39-853-005 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 51-259-003 51-191-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 52-050-001 52-167-001 80-202-357 O-Ring 58-046-001 83-288-001 150 mm 150 mm 25 slot Aluminum wafer carrier.