Parts For Sale TEGAL 47-665-002 TEGAL 47-665-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-665-002 Manufacturer TEGAL Part Number 47-665-002 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 39-680-003 ELECTRODE, CONEHEAD VENTED 37-411-001 54-011-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 37-605-001 58-043-004 39-761-001 CR1144-00103 CR1144-00103 39-733-004 Tegal 903e lower electrode 39-741-009 Tegal 903e lower electrode 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 37-479-001B