Parts For Sale TEGAL 47-665-002 TEGAL 47-665-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-665-002 Manufacturer TEGAL Part Number 47-665-002 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 39-853-005 37-223-008 46-1006-001 40-374-006 40-395-001 RING, FLAT 6 46-787-002 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 50-079-002 39-761-001 99-249-002 PCB TEGAL END POINT DETECTOR 47-733-001 83-288-001