Parts For Sale TEGAL 47-665-002 TEGAL 47-665-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-665-002 Manufacturer TEGAL Part Number 47-665-002 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 51-251-001 51-092-001 74-124-005 38-023-001 COOLING RING 46-787-003 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 51-259-001 40-576-003-C Ring Ceramic Focus Castellated 55-008-001 BELT SPAT 52-175-001
