Parts For Sale TEGAL 47-665-001 TEGAL 47-665-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-665-001 Manufacturer TEGAL Part Number 47-665-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 33-349-004 ELECTRODE, CONDEHEAD UPPER 74-098-001 52-050-001 99-287-003 SHUTTLE INTERFACE BOARD 40-295-003 FOCUS RING 80-202-297 BELT 1/4W 115GRV 80-202-297 A4T1 PAD ETCHER TEGAL 903E 52-167-001 51-271-001 58-046-001 47-736-001