Parts For Sale TEGAL 47-665-001 TEGAL 47-665-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-665-001 Manufacturer TEGAL Part Number 47-665-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 58-073-001 37-181-001 31-406-003 WAFER SENSOR ASSY-VCE 80-650-053 ACTUATOR 74-101-001 39-741-026 Tegal 903e lower electrode 39-956-001 47-695-001 40-790-001 FOCUS RING 50-056-001 37-222-002 Cooling Plate
