Parts For Sale TEGAL 47-664-001 TEGAL 47-664-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-664-001 Manufacturer TEGAL Part Number 47-664-001 Description Status Available Approx. Qty 17 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 17.0 US Other TEGAL Parts 58-073-001 40-481-002 Insulator Ring 74-101-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-467-001 39-894-001 99-287-003 SHUTTLE INTERFACE BOARD 39-956-001 80-202-297 BELT 1/4W 115GRV 80-202-297 A4T1 PAD ETCHER TEGAL 903E 52-047-002 55-008-001 BELT SPAT 150 mm 150 mm 25 slot Aluminum wafer carrier.
