Parts For Sale TEGAL 47-641-002 TEGAL 47-641-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-641-002 Manufacturer TEGAL Part Number 47-641-002 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 58-073-001 37-181-001 39-853-005 99-247-003 SPATULA INTERFACE 74-101-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 39-956-001 47-695-001 80-202-297 BELT 1/4W 115GRV 80-202-297 A4T1 PAD ETCHER TEGAL 903E 40-576-003-C Ring Ceramic Focus Castellated 50-056-001