Parts For Sale TEGAL 47-641-002 TEGAL 47-641-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-641-002 Manufacturer TEGAL Part Number 47-641-002 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 58-073-001 52-058-002 40-768-006 Insulator Ring 40-395-001 RING, FLAT 6 46-810-001 40-467-001 39-894-001 99-287-003 SHUTTLE INTERFACE BOARD 52-171-001 52-047-002 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.
