Parts For Sale TEGAL 47-641-002 TEGAL 47-641-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-641-002 Manufacturer TEGAL Part Number 47-641-002 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 39-741-004 ELECTRODE, LOWER 6" 40-395-001 RING, FLAT 6 74-098-001 40-140-001 RING, CERAMIC INSULATOR 52-050-001 52-041-001 51-271-001 58-046-001 47-736-001 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%