Parts For Sale TEGAL 47-638-001 TEGAL 47-638-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-638-001 Manufacturer TEGAL Part Number 47-638-001 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 37-383-004 40-481-002 Insulator Ring 46-810-001 40-467-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 39-894-001 52-171-001 52-047-002 40-304-001 ELECTRODE, INSULATOR LOWER 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02