Parts For Sale TEGAL 47-638-001 TEGAL 47-638-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-638-001 Manufacturer TEGAL Part Number 47-638-001 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 39-853-005 40-768-006 Insulator Ring 74-098-001 52-050-001 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 52-041-001 51-271-001 58-046-001 47-736-001