Parts For Sale TEGAL 47-638-001 TEGAL 47-638-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-638-001 Manufacturer TEGAL Part Number 47-638-001 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 51-251-001 51-092-001 74-124-005 80-650-053 ACTUATOR 46-787-003 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 51-259-001 40-260-001 WINDOW, SAPPHIRE 1x2.5 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 52-175-001
