Parts For Sale TEGAL 47-636-001 TEGAL 47-636-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-636-001 Manufacturer TEGAL Part Number 47-636-001 Description Status Available Approx. Qty 28 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 28.0 US Other TEGAL Parts 31-406-003 WAFER SENSOR ASSY-VCE 37-411-001 54-011-001 37-605-001 51-228-001 58-043-004 CR1144-00103 CR1144-00103 40-304-001 ELECTRODE, INSULATOR LOWER 50-056-001