Parts For Sale TEGAL 47-609-002 TEGAL 47-609-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-609-002 Manufacturer TEGAL Part Number 47-609-002 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 40-768-006 Insulator Ring 37-223-008 40-374-006 46-787-002 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 50-079-002 39-741-026 Tegal 903e lower electrode 47-639-001 40-790-001 FOCUS RING 47-733-001