Parts For Sale TEGAL 47-597-001 TEGAL 47-597-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-597-001 Manufacturer TEGAL Part Number 47-597-001 Description Status Available Approx. Qty 14 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 14.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL 47-634-001 40-768-006 Insulator Ring 37-411-001 54-011-001 37-605-001 51-228-001 58-043-004 40-295-003 FOCUS RING 37-221-001 UPPER ELECT, .014 HOLE NO RAD.
