Parts For Sale TEGAL 47-597-001 TEGAL 47-597-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-597-001 Manufacturer TEGAL Part Number 47-597-001 Description Status Available Approx. Qty 14 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 14.0 US Other TEGAL Parts 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 150 mm 150 mm 25 slot Aluminum wafer carrier. 58-073-001 37-221-002 UPPER ELECT ANOD, NON ANODIZED 39-853-005 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 74-101-001 40-467-001 39-894-001 39-956-001 52-047-002
