Parts For Sale TEGAL 47-573-002 TEGAL 47-573-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-573-002 Manufacturer TEGAL Part Number 47-573-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 37-181-001 31-406-003 WAFER SENSOR ASSY-VCE 39-756-003 74-101-001 47-583-001 39-956-001 47-695-001 50-056-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02