Parts For Sale TEGAL 47-573-002 TEGAL 47-573-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-573-002 Manufacturer TEGAL Part Number 47-573-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 74-098-001 52-050-001 39-733-004 Tegal 903e lower electrode 52-041-001 99-249-002 PCB TEGAL END POINT DETECTOR 51-271-001 58-046-001 47-736-001