Parts For Sale TEGAL 47-513-001 TEGAL 47-513-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-513-001 Manufacturer TEGAL Part Number 47-513-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 40-768-004 Insulator Ring 46-180-001 80-095-278 DAC SCAN BOARD 74-149-002 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 40-482-001 52-169-001 52-047-001 40-576-003-C Ring Ceramic Focus Castellated 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 39-665-001 80-200-121 BEARING DOOR T915 TEGAL CORPORATION