Parts For Sale TEGAL 47-478-001 TEGAL 47-478-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-478-001 Manufacturer TEGAL Part Number 47-478-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 51-251-001 51-092-001 74-124-005 46-787-003 51-259-001 40-295-003 FOCUS RING 99-249-002 PCB TEGAL END POINT DETECTOR 52-175-001 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL