Parts For Sale TEGAL 47-410-003 TEGAL 47-410-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-410-003 Manufacturer TEGAL Part Number 47-410-003 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 39-741-004 ELECTRODE, LOWER 6" 99-247-003 SPATULA INTERFACE 37-223-008 40-374-006 83-259-001 46-787-002 50-079-002 47-639-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 47-733-001