Parts For Sale TEGAL 47-410-003 TEGAL 47-410-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-410-003 Manufacturer TEGAL Part Number 47-410-003 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 58-073-001 74-101-001 40-467-001 39-894-001 39-956-001 52-047-002 50-056-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 150 mm 150 mm 25 slot Aluminum wafer carrier.