Parts For Sale TEGAL 47-385-002 TEGAL 47-385-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-385-002 Manufacturer TEGAL Part Number 47-385-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 55-008-001 BELT SPAT 150 mm 150 mm 25 slot Aluminum wafer carrier. 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL 47-634-001 37-411-001 54-011-001 37-605-001 39-741-026 Tegal 903e lower electrode 58-043-004 47-474-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001