Parts For Sale TEGAL 47-364-001 TEGAL 47-364-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-364-001 Manufacturer TEGAL Part Number 47-364-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 80-650-053 ACTUATOR 80-195-450 51-056-001 42-826-005 39-380-001 50-088-001 39-733-004 Tegal 903e lower electrode 37-175-001A 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 150 mm 150 mm 25 slot Aluminum wafer carrier.
