Parts For Sale TEGAL 47-364-001 TEGAL 47-364-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-364-001 Manufacturer TEGAL Part Number 47-364-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 52-058-002 40-395-001 RING, FLAT 6 74-098-001 39-741-026 Tegal 903e lower electrode 52-050-001 52-041-001 58-046-001 47-736-001 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 47-445-001