Parts For Sale TEGAL 47-346-005 TEGAL 47-346-005 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-346-005 Manufacturer TEGAL Part Number 47-346-005 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 74-098-001 52-050-001 99-287-003 SHUTTLE INTERFACE BOARD 40-295-003 FOCUS RING 93-123-006 BELT 52-041-001 58-046-001 47-736-001 39-735-004 Tegal 903e lower electrode 47-445-001