Parts For Sale TEGAL 47-320-001 TEGAL 47-320-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-320-001 Manufacturer TEGAL Part Number 47-320-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 37-181-001 74-101-001 47-583-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 99-287-003 SHUTTLE INTERFACE BOARD 39-956-001 47-695-001 39-818-001 SLEEVE,FIBER OPTIC #39-818-001 A4T1 PAD ETCHER TEGAL 903E 50-056-001 80-200-121 BEARING DOOR T915 TEGAL CORPORATION