Parts For Sale TEGAL 47-320-001 TEGAL 47-320-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-320-001 Manufacturer TEGAL Part Number 47-320-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 40-481-002 Insulator Ring 40-140-001 RING, CERAMIC INSULATOR 47-339-005 52-050-001 39-741-009 Tegal 903e lower electrode 52-041-001 58-046-001 47-736-001 47-445-001