Parts For Sale TEGAL 47-320-001 TEGAL 47-320-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-320-001 Manufacturer TEGAL Part Number 47-320-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 47-634-001 40-395-001 RING, FLAT 6 37-411-001 54-011-001 37-605-001 58-043-004 47-474-001 39-741-009 Tegal 903e lower electrode 37-221-001 UPPER ELECT, .014 HOLE NO RAD.
