Parts For Sale TEGAL 47-285-004 TEGAL 47-285-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-285-004 Manufacturer TEGAL Part Number 47-285-004 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 38-023-001 COOLING RING 47-339-005 52-050-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 52-041-001 80-202-357 O-Ring 58-046-001 47-736-001 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 47-445-001