Parts For Sale TEGAL 47-285-004 TEGAL 47-285-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-285-004 Manufacturer TEGAL Part Number 47-285-004 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 37-223-008 80-650-053 ACTUATOR 93-229-005 RF CABLE 901E 39-756-003 40-374-006 46-787-002 50-079-002 47-639-001 47-733-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 150 mm 150 mm 25 slot Aluminum wafer carrier.