Parts For Sale TEGAL 47-272-001 TEGAL 47-272-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-272-001 Manufacturer TEGAL Part Number 47-272-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 40-481-002 Insulator Ring 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 47-339-005 52-050-001 39-733-004 Tegal 903e lower electrode 52-041-001 58-046-001 47-736-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 47-445-001