Parts For Sale TEGAL 47-266-002 TEGAL 47-266-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-266-002 Manufacturer TEGAL Part Number 47-266-002 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL 47-634-001 37-221-002 UPPER ELECT ANOD, NON ANODIZED 33-349-004 ELECTRODE, CONDEHEAD UPPER 54-011-001 37-605-001 58-043-004 47-474-001 CR1144-00103 CR1144-00103