Parts For Sale TEGAL 47-266-002 TEGAL 47-266-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-266-002 Manufacturer TEGAL Part Number 47-266-002 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 40-481-002 Insulator Ring 80-650-053 ACTUATOR 80-195-450 51-056-001 42-826-005 39-380-001 50-088-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 40-295-003 FOCUS RING 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 37-175-001A
