Parts For Sale TEGAL 47-266-001 TEGAL 47-266-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-266-001 Manufacturer TEGAL Part Number 47-266-001 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 39-741-004 ELECTRODE, LOWER 6" 80-195-450 51-056-001 42-826-005 39-380-001 50-088-001 37-175-001A 40-576-003-C Ring Ceramic Focus Castellated 150 mm 150 mm 25 slot Aluminum wafer carrier.
