Parts For Sale TEGAL 47-261-004 TEGAL 47-261-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-261-004 Manufacturer TEGAL Part Number 47-261-004 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 51-251-001 51-092-001 74-124-005 40-481-002 Insulator Ring 46-1006-001 46-787-003 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 51-259-001 39-733-004 Tegal 903e lower electrode 55-008-001 BELT SPAT 52-175-001