Parts For Sale TEGAL 47-261-002 TEGAL 47-261-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-261-002 Manufacturer TEGAL Part Number 47-261-002 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 47-639-001 39-761-001 37-223-008 39-741-009 Tegal 903e lower electrode 40-374-006 47-733-001 46-787-002 50-079-002