Parts For Sale TEGAL 47-220-003 TEGAL 47-220-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-220-003 Manufacturer TEGAL Part Number 47-220-003 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 39-853-005 47-526-001 51-191-001 46-786-001 47-672-001 40-295-003 FOCUS RING 52-059-001 55-008-001 BELT SPAT 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 83-288-001