Parts For Sale TEGAL 47-218-002 TEGAL 47-218-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-218-002 Manufacturer TEGAL Part Number 47-218-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 51-251-001 51-092-001 31-406-003 WAFER SENSOR ASSY-VCE 74-124-005 83-259-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 51-259-001 47-261-002 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 52-175-001 150 mm 150 mm 25 slot Aluminum wafer carrier.