Parts For Sale TEGAL 47-169-002 TEGAL 47-169-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-169-002 Manufacturer TEGAL Part Number 47-169-002 Description Status Available Approx. Qty 15 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 15.0 US Other TEGAL Parts 37-181-001 74-101-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 47-583-001 39-761-001 39-956-001 47-695-001 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 50-056-001 150 mm 150 mm 25 slot Aluminum wafer carrier.