Parts For Sale TEGAL 47-169-002 TEGAL 47-169-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-169-002 Manufacturer TEGAL Part Number 47-169-002 Description Status Available Approx. Qty 15 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 15.0 US Other TEGAL Parts 47-634-001 40-768-004 Insulator Ring 39-680-003 ELECTRODE, CONEHEAD VENTED 80-650-053 ACTUATOR 37-411-001 54-011-001 51-228-001 58-043-004 47-474-001 40-576-003-C Ring Ceramic Focus Castellated
