Parts For Sale TEGAL 47-161-001 TEGAL 47-161-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-161-001 Manufacturer TEGAL Part Number 47-161-001 Description Status Available Approx. Qty 42 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 42.0 US Other TEGAL Parts 31-406-003 WAFER SENSOR ASSY-VCE 47-473-001 40-707-001 47-519-001 39-741-009 Tegal 903e lower electrode 80-202-297 BELT 1/4W 115GRV 80-202-297 A4T1 PAD ETCHER TEGAL 903E 51-189-001 47-443-001 40-349-001