Parts For Sale TEGAL 47-158-002 TEGAL 47-158-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-158-002 Manufacturer TEGAL Part Number 47-158-002 Description Status Available Approx. Qty 41 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 41.0 US Other TEGAL Parts 58-073-001 46-1006-001 40-467-001 47-339-005 39-894-001 52-171-001 99-249-002 PCB TEGAL END POINT DETECTOR 52-047-002 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 150 mm 150 mm 25 slot Aluminum wafer carrier.