Parts For Sale TEGAL 47-123-002 TEGAL 47-123-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-123-002 Manufacturer TEGAL Part Number 47-123-002 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 47-158-002 38-023-001 COOLING RING 47-339-005 52-050-001 40-295-003 FOCUS RING 52-041-001 40-304-001 ELECTRODE, INSULATOR LOWER 58-046-001 47-445-001