Parts For Sale TEGAL 47-114-001 TEGAL 47-114-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-114-001 Manufacturer TEGAL Part Number 47-114-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 38-023-001 COOLING RING 47-155-001 40-374-006 46-787-002 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 50-079-002 47-639-001 47-733-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 150 mm 150 mm 25 slot Aluminum wafer carrier.